Tutorial lectures will take place on Monday 19th afternoon, from 1pm to 5:30pm ECT. The lectures will take place at the conference location (Gasthuisberg, Leuven).

Tutorials are organized jointly by Prof. Stefan De Gendt (KULeuven, BE), Prof. Fred Roozeboom (University of Twente, NL) and Prof. Niels Quack (University of Sydney, AUS).

Two series of lectures are planned.

1. Ubiquitous Sensing with Micro- and Nanosystems Technologies

Join us at for an exciting tutorials session on Sensing with Micro-/Nanoengineered Devices! The session is composed of 4 individual modules, covering sensing mechanisms and applications in breadth and depth, highlighting the unique benefits of Micro- and Nanotechnologies in quite fantastic sensing applications. What advantages does (1) the tight integration of CMOS electronic readout and signal conditioning in close vicinity of the actual sensor provide? What sensing mechanisms can be employed in state-of-the art (2) integrated photonics? How do (3) neuronal sensing interfaces help to gain a better understanding of our brain? And can (4) 2D materials efficiently harness the mysterious world of quantum mechanics? The tutorials have specifically been designed to address a broad audience familiar with micro- and nanoengineering in general, without the need for specialist knowledge, so it is a great chance for participants at MNE2022 to learn a new topic or to refresh/update on the state of the art in sensing at the micro- and nanoscale from our fantastic tutorial speakers who are outspoken leaders in their respective fields.

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2. Atomic Scale Processing

Today’s CMOS technology scaling roadmap depends ever more on the techniques of Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). These are the only escapes from the bottlenecks in manufacturing 3-dimensional, vertically stacked logic (e.g. GAA nanosheet transistors) and memory (e.g. so-called 176 layers 3D NAND flash).

On Sept. 19, 2022 (Monday afternoon) MNE2022 will offer a tutorial session on Atomic Layer Processing. The session will comprise 4 individual tutorials of 1-hour each, covering the ins and outs of the powerful techniques of atomic-scale deposition and etching. The objective of the tutorials is to make the MNE2022 participants, with a proficient background in micro- and nano-engineering, familiar with the fundamentals and fascinating applications in ALD and ALE.

Starting with (1) Fundamentals, 3D layer conformality and In Situ analytics of ALD and MLD (Molecular Layer Deposition), we will present (2) Recent Developments in Selective-area deposition and bottom-up approaches. Next, we will treat (3) State-of-the-art Plasma etching and Atomic Layer Etching and finish with an overview of (4) Industrial perspectives of atomic-scale processing technologies.

In summary, this is a great opportunity for MNE2022 participants to learn about a new topic in the state-of-the-art ultrathin-film science & engineering!

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